We develop custom Atomic Layer Deposition tools for your research needs with 2-8 heated precursor channels, plasma and ozone options, in-situ metrology, fully automated software package with recipe control and user-friendly interface.
OKYAY TECHNOLOGY R & D
We added Plasma ALD Systems to our product portfolio.
Palo Alto, CA
OKYAY TECHNOLOGY R&D ENGINEERING GLOBAL ALD SOLUTIONS PARTNER