We develop custom Atomic Layer Deposition tools and recipes. Our team has decades of experience in ALD science and technology with over 300 scientific journal and conference articles in the ALD area. OkyayTech holds numerous patents on ALD equipment design and recipes. Our technology is unique for Oxygen-free Gallium Nitride (GaN) deposition by ALD.


Founder and CTO

Ali is a technology enthusiast and an entrepreneur with experience in applied physics, energy and engineering. Following his graduation from Stanford University (PhD in electrical engineering) he became a tenured faculty at Bilkent University developing and commercialising cutting edge technologies in semiconductors, photonics and atomic layer processing. In 2010, he started OkyayTech Inc to develop ALD technology solutions for electronics/MEMS, health, and energy industries.